Modular Chamber System for Highly Toxic Gases

The CT--BW 2009 series point--of--use abatement systems are highly efficient systems used in CVD-and etching applications for photovoltaic，semiconductor and other related industries．
As new process tools and technologies with highly corrosive gases and increasing gas loads are introduced，further improvements in abatement technology are required．The CT—BW 2009 series meets these requirements．The CT-BW 2009 series enjoys all the advantages such as high cleaning efficiency for PVC’S and other gases，reliable abatement of all waste gases from CVD and etching processes．selection of various fuel gases and iS in compliance with allinternational safety standards．The system iS designed for maximum corrosion resistance and to handle large amounts of solid reaction by—products．

Features and Benefits

• Stand alone electronic cabinet
• Up to four independent CT-BW units
• Only one inlet point for all media like N2, natural gas, H2O, O2, CDA, a.o.
• Mechanical filter station
• Easy and fast to maintain
• Coming features: Combination of CT-D, CT-W, CT-BW and CT-BW EPI in one cabinet
• Safety standards comply with international regulations
• High corrosion resistance based on new reactor top plate design
• New housing with reduced noise level
• Pilot burner resistant to pressure variations
• Touch panel with help text for easy operation and maintenance
• Individual adjustment of heating jacket temperature on every inlet to provide blocking
• Flow sensors for washing liquid flow at the touch panel indicate preventive maintenance