Overview
EII starts the business with Semiconductor automation system, it has definitive standards for diagnostic testing,automation equipment repair and refurbishment. Our robot service covers a lot of type including PRI、Brooks、Rorze、MECS、JEL……
EII is the level-one representative of centrotherm photovoltaics AG – Semiconductor & Microelectronics Division.In semiconductor field, Centrotherm product portfolio includes production systems for thermal processes, such as annealing, oxidation, diffusion, LPCVD,PECVD.They are successfully employed in the semiconductor industry worldwide, offering high-quality process results, low operating costs and maximum throughput. Centrotherm furnace provides a high degree of flexibility for all standard atmospheric and low pressure processes up to 300mm wafers and 200 wafers per batch.
According to different applications, we provide series of vacuum soldering system, such as VLO6、VLO20、VLO180 and VLO300 etc. Thanks to voidless and fluxless reflow soldering, our vacuum soldering systems offer ultra-clean solder joints for the following applications, Power semiconductors, microelectronic hybrid modules, optoelectronic packaging, wafer level packaging, UHB-LED packaging, MEMS. By using our vacuum soldering system, the void rate can reach less than 2%.
Meanwhile, Centrotherm also is the pioneer of the SIC device equipment manufacturer, which already developed SiC oxidator and Activator up to 150mm wafer size, 50 wafers per batch.
EII has extensive cooperation with Centrotherm clean solutions in new energy、medicine manufacturer and semiconductor industry, We already have a lot of applications for the treatment of waste gases interiorly, such as Suntech、NEC、ASMC and Simgui etc. Furthermore, we are also the representative of Austin Scientific USA which belongs to Oxford Instruments for all Cyro pumps series businesses. Our products include Cryo pumps, Helium compressors, Helium lines, Absorbers etc. They are applied in high vacuum systems such as implant, sputtering, evaporation, surface analysis, accelerator, industry coated etc. They can also use for developing systems in universities and research institutes.
We have built up cryopump overhual center in Shanghai according to the authorization by Austin Scientific USA Now we can supply comprehensive refurbishment and overhaul for CTI、Austin OEM pumps.
EII strives to maintain unparalleled provisions for cost savings and personal service that are available nowhere else. Our technical database and experiences span a decade of manufacturing in several different markets. With our proven ability to meet the highest standards and our focus on affordable solutions, our products have earned international recognition. We expect our business could boom with our customers, and every of our customer's success is our best success.
Business Scope
Business Scope:Centrotherm oxidation、Centrotherm Activator 150、Centrotherm LPCVD、Centrotherm PECVD、VLO6、VLO12、VLO20、VLO180、VLO300、Scrubber、Cryo pump & Compressor、Robot、Controller、Aligner |
Product: VLO20、VLO180、VLO300、 Verticoo200、Oxidator 150、Activator 150、Scrubber、 LPCVD、PECVD、MECS Robot、MECS controller、Brooks Z-Bot、Brooks Aligner、Rorze Robot、Rorze Controller、 PRI Robot、PRI Controller、Genmark Robot、Genmark Controller、Pre Aligner、Pre Controller、Cryo pump & Compressor |