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Centrotherm-Vacuum Soldering Systems

VLO 6 / VLO 12 Vacuum Soldering System
The centrotherm VLO 6 and VLO 12 vacuum soldering systems have been designed for Advanced Packaging and Power Semiconductor applications.
VLO20 Vacuum Soldering System
The centrotherm VLO 20 vacuum soldering system meets the highest demands of R&D departments as well as the needs of small production facilities which use vacuum to achieve voidless soldering joints.
VLO180/VLO300 Vacuum Soldering System
The centrotherm VLO 180 or VLO 300 vacuum soldering systems are ideally suited for high volume production facilities with various materials up to 750 °C.

Centrotherm-Horizontal Furnaces

E1200
The E1200 small batch laboratory system supports the multiple process capability needs of a low volume production with high process performance.
E1550
The centrotherm E1550 system is optimized to support the multiple process capability needs of a medium volume and high process performance user in a easy-tomaintain horizontal furnace platform.
E2000
The design of the centrotherm E2000 system supports the multiple process capability needs of a maximum capacity.

Centrotherm-High Temperature Furnace

Activator 150
The centrotherm Activator 150 high temperature furnace line has been developed for post implantation annealing of Silicon Carbide (SiC) or Gallium Nitride (GaN) devices.
Verticoo 200
Designed for high volume production with a maximum throughput rate and a high degree of flexibility, the verticoo 200 is suitable for all standard atmospheric and low pressure CVD processes.
Oxidator 150
The Oxidator 150 is a high-temperature furnace, especially designed for the oxidation of silicon carbide (SiC) by centrotherm thermal solutions.
DBC
Muffle Furnace for Serial Production and R&D.

Centrotherm-Scrubber

CT-BW 2009
The CT--BW 2009 series point--of--use abatement systems are highly efficient systems used in CVD-and etching applications for photovoltaic,semiconductor and other related industries.
CT-W Scrubber
Wet Scrubber systems are a proven solution for the treatment of waste gases emitted in different CVD and etching processes.
CT-D Dry Bed
The centrotherm CT-D Dry Bed Absorber offers a safe, efficient and reliable point-of-use abatement solution for the semiconductor, photovoltaic and related industries.

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