Highly Efficient Systems for Semiconductor Industries
Wet Scrubber systems are a proven solution for the treatment of waste gases emitted in different CVD and etching processes. The new centrotherm clean solutions Wet Scrubber CT-W 2009 has a great advantage over common wet scrubbers: A special CT-W feature reduces up to 99% of the dust particles in the waste gas flow. The absorbed dust particles are discharged with the waste water. The CT-W can be installed as a stand alone unit, or as an added module in our burner washer system, the CT-BW 2009. The CT-W wet scrubber can be operated like an independent system or in-line with a CT-BW. For example, if an added wet stage is necessary due to high acid or dust flows to stay in compliance with TA-Luft. When placed post CT-BW, the dust reduction and acid absorption is typically greater than 99,9%. |
- Features and Benefits
- Cleaning efficiency up to 99.99%
- Dust reduction up to 99%, without troublesome dry dust disposal
- Very low cost of ownership
- Fully automated
- Highest uptime > 99%
- Integrated process and system monitoring
- Up to four process inlets can be operated simultaneously
- Bypass valving (option)
- Waste gas flow up to 3,000 slm, with three different washing tower sizes available
- SEMI S2 / CE compliant and NFPA79:2002 approved
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