Vertical system for mass production

Designed for high volume production with a maximum throughput rate and a high degree of flexibility, the verticoo 200 is suitable for all standard atmospheric and low pressure CVD processes. The single tube set-up with dual boat logistics is optimized for minimum handling time as well as low cost of ownership with low maintenance costs.

Up to 150 process wafers per batch
Auto alignment
Dual boat logistics
Water cooled heating cassette
Small footprint
Side by side installation possible

Applications

• Annealing
• Diffusion
• LPCVD
• Oxidation