| Standard cryopump for clean, oil free high vacuum pumping for research and production applications offered at highly competitive pricing. |
| Standard cryopump applications: sputtering tools, ion implanters, R&D bell-jar systems, surface analysis, accelerators, beam lines and general vacuum systems. |
|
| Parameter |
|
|
| Cryo-Plex 8 - Gas pumping speeds liters/second |
|
| Air |
1,500 |
| Water |
4,000 |
| Hydrogen |
2,500 |
| Argon |
1,200 |
| Gas capacities - standard liters @ 5x10-6 Torr |
|
| Hydrogen |
18 |
| Argon |
1,000 |
| Throughput |
|
| Argon sccm |
700 |
| Cool down time |
|
| 60 Hertz |
90 Min |
| Cryopump measurements |
|
| Height |
20.7" |
| Weight LBS |
45 |
| Inlet flange |
ANSI/ISO/CF |
|
|
|
|
|
