HomeProductCryo pump & Compressor

Austin Cryo-Plex 8LP Cryo pump

真空焊接炉vlo20

 

Standard cryopump configuration for semiconductor tools the CryoPlex 8LP is ideal for space constrained applications requiring clean, oil free high vacuum pumping solutions.

 

 

 

Parameter
Cryo-Plex 10 - Gas pumping speeds liters/second  
Air 1,500
Water 4,000
Hydrogen 2,200
Argon 1,200
Gas capacities - standard liters @ 5x10-6 Torr  
Hydrogen 12
Argon 1,000
Throughput  
Argon sccm 700
Crossover  
Torr-liters 150
Cool down time  
60 Hertz 90 Min
Cryopump measurements  
Height 7.03"
Length 22.6"
Inlet flange ANSI/ISO/CF

 

 

 

HomeProductCryo pump & Compressor