Standard cryopump configuration for semiconductor tools the CryoPlex 8LP is ideal for space constrained applications requiring clean, oil free high vacuum pumping solutions.
|
| Parameter |
|
|
| Cryo-Plex 10 - Gas pumping speeds liters/second |
|
| Air |
1,500 |
| Water |
4,000 |
| Hydrogen |
2,200 |
| Argon |
1,200 |
| Gas capacities - standard liters @ 5x10-6 Torr |
|
| Hydrogen |
12 |
| Argon |
1,000 |
| Throughput |
|
| Argon sccm |
700 |
| Crossover |
|
| Torr-liters |
150 |
| Cool down time |
|
| 60 Hertz |
90 Min |
| Cryopump measurements |
|
| Height |
7.03" |
| Length |
22.6" |
| Inlet flange |
ANSI/ISO/CF |
|
|
| | |
