Horizontal furnace for R&D

The E 1200 small batch laboratory system supports the multiple process capability needs of a low volume production with high process performance. The centrotherm design is outstanding for high performance, small footprint and low cost of ownerhip while offering a high process flexibility required for multiple applications

• Atmospheric,PECVD and LPCVD processes
• Process selectable chamber options available in 3 or 4 stack configurations
• Advanced water cooling system guarantees no thermal interference between the different process tubes
• Optional: automated boat loading
• Modular component design for ease of installation and start up

Processes
Annealing

• Diffusion
• LPCVD
• Oxidation
• PECVD